{"id":30,"date":"2023-04-28T16:19:04","date_gmt":"2023-04-28T14:19:04","guid":{"rendered":"http:\/\/quantumsilicon-grenoble.eu\/?page_id=30"},"modified":"2023-05-03T10:54:06","modified_gmt":"2023-05-03T08:54:06","slug":"about-us","status":"publish","type":"page","link":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/about-us\/","title":{"rendered":"ABOUT US"},"content":{"rendered":"<p>[et_pb_section fb_built=&#8221;1&#8243; fullwidth=&#8221;on&#8221; custom_padding_last_edited=&#8221;on|desktop&#8221; admin_label=&#8221;section&#8221; _builder_version=&#8221;4.21.0&#8243; background_video_webm=&#8221;http:\/\/quantumsilicon-grenoble.eu\/wp-content\/uploads\/2023\/04\/molecular-bg.webm&#8221; background_video_width=&#8221;100%&#8221; max_width=&#8221;100%&#8221; min_height=&#8221;390px&#8221; custom_padding=&#8221;0px|0px|20px|0px|false|false&#8221; custom_padding_tablet=&#8221;50px|0|50px|0&#8243; custom_padding_phone=&#8221;&#8221; transparent_background=&#8221;off&#8221; make_fullwidth=&#8221;off&#8221; use_custom_width=&#8221;off&#8221; width_unit=&#8221;off&#8221; custom_width_px=&#8221;1080px&#8221; custom_width_percent=&#8221;80%&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_fullwidth_slider _builder_version=&#8221;4.21.0&#8243; _module_preset=&#8221;default&#8221; header_font=&#8221;Arial||||||||&#8221; header_text_align=&#8221;center&#8221; body_text_align=&#8221;center&#8221; module_alignment=&#8221;center&#8221; custom_margin=&#8221;0px|0px|0px|0px|false|false&#8221; custom_padding=&#8221;150px|0px|0px|0px|false|false&#8221; header_text_shadow_style=&#8221;preset2&#8243; global_colors_info=&#8221;{}&#8221;][et_pb_slide heading=&#8221;ABOUT US&#8221; _builder_version=&#8221;4.21.0&#8243; _module_preset=&#8221;default&#8221; header_font=&#8221;Arial|||on|||||&#8221; header_text_align=&#8221;center&#8221; background_color=&#8221;RGBA(255,255,255,0)&#8221; background_enable_color=&#8221;on&#8221; background_enable_video_webm=&#8221;off&#8221; width=&#8221;80%&#8221; max_width=&#8221;1080px&#8221; header_text_shadow_style=&#8221;preset2&#8243; global_colors_info=&#8221;{}&#8221; sticky_transition=&#8221;on&#8221;][\/et_pb_slide][\/et_pb_fullwidth_slider][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; custom_padding_last_edited=&#8221;on|desktop&#8221; admin_label=&#8221;Section&#8221; _builder_version=&#8221;4.21.0&#8243; min_height=&#8221;271px&#8221; custom_margin=&#8221;0px||||false|false&#8221; custom_padding=&#8221;0px|0px|0px|0px|false|false&#8221; custom_padding_tablet=&#8221;50px|0|50px|0&#8243; custom_padding_phone=&#8221;&#8221; transparent_background=&#8221;off&#8221; make_fullwidth=&#8221;off&#8221; use_custom_width=&#8221;off&#8221; width_unit=&#8221;off&#8221; custom_width_px=&#8221;1080px&#8221; custom_width_percent=&#8221;80%&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_row _builder_version=&#8221;4.21.0&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_column type=&#8221;4_4&#8243; _builder_version=&#8221;4.21.0&#8243; _module_preset=&#8221;default&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_image src=&#8221;http:\/\/quantumsilicon-grenoble.eu\/wp-content\/uploads\/2023\/05\/QuantumSilicon-Grenoble_Group-1024&#215;576.png&#8221; title_text=&#8221;QuantumSilicon-Grenoble_Group&#8221; align=&#8221;center&#8221; force_fullwidth=&#8221;on&#8221; _builder_version=&#8221;4.21.0&#8243; _module_preset=&#8221;default&#8221; min_height=&#8221;1.5px&#8221; custom_margin=&#8221;2px|||||&#8221; custom_padding=&#8221;7px|||||&#8221; mix_blend_mode=&#8221;lighten&#8221; box_shadow_style=&#8221;preset1&#8243; global_colors_info=&#8221;{}&#8221;][\/et_pb_image][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; inner_shadow=&#8221;on&#8221; custom_padding_last_edited=&#8221;on|desktop&#8221; admin_label=&#8221;section&#8221; _builder_version=&#8221;4.21.0&#8243; background_color=&#8221;rgba(255,255,255,0)&#8221; width=&#8221;100%&#8221; min_height=&#8221;1881.7px&#8221; custom_padding=&#8221;10px|0px|10px|0px|false|false&#8221; custom_padding_tablet=&#8221;50px|0|50px|0&#8243; custom_padding_phone=&#8221;&#8221; transparent_background=&#8221;on&#8221; make_fullwidth=&#8221;off&#8221; use_custom_width=&#8221;off&#8221; width_unit=&#8221;on&#8221; custom_width_px=&#8221;1080px&#8221; custom_width_percent=&#8221;80%&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_row column_structure=&#8221;2_3,1_3&#8243; use_custom_gutter=&#8221;on&#8221; column_padding_mobile=&#8221;on&#8221; admin_label=&#8221;row&#8221; _builder_version=&#8221;4.21.0&#8243; background_color=&#8221;#ffffff&#8221; background_size=&#8221;initial&#8221; background_position=&#8221;top_left&#8221; background_repeat=&#8221;repeat&#8221; module_alignment=&#8221;center&#8221; custom_padding=&#8221;0px|0px|0px|0px|true|true&#8221; make_fullwidth=&#8221;off&#8221; use_custom_width=&#8221;off&#8221; width_unit=&#8221;on&#8221; custom_width_px=&#8221;1080px&#8221; custom_width_percent=&#8221;80%&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_column type=&#8221;2_3&#8243; admin_label=&#8221;Left-txt Zone&#8221; _builder_version=&#8221;4.21.0&#8243; custom_padding=&#8221;|||&#8221; global_colors_info=&#8221;{}&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_text admin_label=&#8221;Text&#8221; _builder_version=&#8221;4.21.0&#8243; width=&#8221;100%&#8221; custom_margin=&#8221;|116px||-29px||&#8221; use_border_color=&#8221;off&#8221; border_style=&#8221;solid&#8221; global_colors_info=&#8221;{}&#8221;]<\/p>\n<h2><span style=\"color: #0c71c3;\"><strong>ABOUT US<\/strong><\/span><\/h2>\n<p>&nbsp;<\/p>\n<p><span style=\"color: rgba(0, 0, 0, 0.498039);\">Our group gathers\u00a0researchers from three different institutes having different complementary<\/span><br \/><span style=\"color: rgba(0, 0, 0, 0.498039);\"> competences:<\/span><\/p>\n<ul>\n<li style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039);\"><span lang=\"EN-US\">\u00a0<\/span><!--[endif]--><span lang=\"EN-US\">Experimental physicists from the Institute for Nanoscience and\u00a0Cryogenics (CEA-INAC) and from the N\u00e9el Institute (CNRS-NEEL) with an expertise\u00a0in quantum electronics, low-temperature transport, quantum coherent manipulation\u00a0of single electrons in semiconductor nanostructures<\/span><\/span><\/li>\n<li style=\"text-align: justify;\"><span lang=\"EN-US\" style=\"color: rgba(0, 0, 0, 0.498039);\">Theoretical condensed-matter physicists from CEA-INAC, with a\u00a0long-standing expertise in the modeling of semiconductor nanodevices<\/span><\/li>\n<li style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039);\"><span style=\"color: rgba(0, 0, 0, 0.498039);\"><span style=\"color: rgba(0, 0, 0, 0.498039);\"><span lang=\"EN-US\">\u00a0<\/span><!--[endif]--><span lang=\"EN-US\">Microelectronics engineers from the Laboratory of Electronics and Information\u00a0Technology (CEA-Leti) with a broad expertise in silicon technology and\u00a0integration, including device modeling and circuit design.<\/span><\/span><\/span><\/span><\/li>\n<\/ul>\n<h2><\/h2>\n<h2><strong><span style=\"color: #0c71c3;\">OUR MISSION<\/span><br \/><\/strong><\/h2>\n<p style=\"text-align: justify;\"><span lang=\"EN-US\" style=\"color: rgba(0, 0, 0, 0.498039);\">Many of us have been\u00a0collaborating on common projects for over fifteen years. Strong of this long-lasting\u00a0interaction and of a jointly developed know-how, our multi-institutional team is\u00a0currently expanding and focusing its research towards the developing field of quantum\u00a0engineering. Among our primary goals, we aim at developing a scalable quantum\u00a0processor based on state-of-the-art silicon technology.<\/span><\/p>\n<p>&nbsp;<\/p>\n<h2 style=\"background-color: #ffffff;\"><\/h2>\n<h2 style=\"background-color: #ffffff;\"><span style=\"color: #0c71c3;\"><strong>RESEARCH\u00a0FACILITIES<\/strong><\/span><\/h2>\n<p>&nbsp;<\/p>\n<ul>\n<li class=\"MsoNormal\">\n<h3><span style=\"color: #303030;\">Experimental facilities at CEA-INAC<\/span><\/h3>\n<\/li>\n<\/ul>\n<p style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039);\">Inac, a joint CEA-UGA research institute, is a major actor in fundamental research on condensed matter, soft matter and cryogenics in Grenoble.\u00a0<\/span><span style=\"color: rgba(0, 0, 0, 0.498039);\">Most of its activities in physics, chemistry and at the interface with biology are included under the banner of nanoscience. It has programmes in several strategic areas: low carbon energy, information technology, heath technology, global defence and security, development and use of large facilities, cryogenics for space and for large facilities. With the advent of nanosciences, the organisation of research within Inac based on decompartmentalizing scientific fields is more relevant than ever: synergies of all kinds are looked into in order to efficiently exploit all properties of matter, at the nanometer scale.<\/span><\/p>\n<p><span lang=\"EN-US\" style=\"font-size: 10.5pt; font-family: 'Open Sans', serif; background-color: white;\">\u00a0<\/span><\/p>\n<ul>\n<li class=\"MsoNormal\" style=\"background-color: #ffffff;\"><span style=\"font-size: 22px; color: #303030;\">Experimental facilities at CNRS-NEEL<\/span><a class=\"spip_out\" style=\"color: rgba(255, 255, 255, 0); font-family: arial; font-size: 12.8px; text-align: start; background-color: #ffffff;\" href=\"http:\/\/neel.cnrs.fr\/\" rel=\"external\">Istitn<\/a><\/li>\n<\/ul>\n<p style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039);\"><span style=\"color: #99cc00;\"><a style=\"color: #99cc00;\" href=\"http:\/\/neel.cnrs.fr\/\" rel=\"external\">Institut N\u00e9el<\/a><\/span>\u00a0is a research laboratory of\u00a0<span style=\"color: #99cc00;\"><a style=\"color: #99cc00;\" href=\"http:\/\/www.cnrs.fr\/\" rel=\"external\">CNRS<\/a><\/span>, closely linked with\u00a0<span style=\"color: #99cc00;\"><a style=\"color: #99cc00;\" href=\"http:\/\/www.ujf-grenoble.fr\/\" rel=\"external\">Universit\u00e9 Joseph Fourier<\/a><\/span>, Grenoble, with total staff 450. Its main expertise is condensed matter physics, with activities combining fundamental and applied purposes including patenting and industry-driven projects in energy, ICT, biotechnologies. It is part in the recently-accepted network of excellence of Grenoble laboratories for Nanosciences, Energy of the future and Healthcare-<span style=\"color: #99cc00;\"> (<a style=\"color: #99cc00;\" href=\"http:\/\/grenoble-lanef.fr\/\" rel=\"external noopener\" target=\"_blank\" title=\"Lanef Grenoble website\">Lanef Grenoble<\/a>)<\/span>, with a large number of supporting companies.<\/span><\/p>\n<p class=\"MsoNormal\" style=\"text-align: justify;\"><span lang=\"EN-US\" style=\"font-size: 10.5pt; font-family: 'Open Sans', serif; background-color: white;\">\u00a0<\/span><\/p>\n<ul>\n<li class=\"MsoNormal\" style=\"background-color: #ffffff;\">\n<h3><span style=\"color: #303030;\">CMOS fabrication platform at CEA-LETI<\/span><\/h3>\n<\/li>\n<\/ul>\n<p class=\"MsoNormal\" style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039);\">The team is widely known and recognized for its research on advanced CMOS and more generally on logic devices. The integration activities span devices from FDSOI to spin Si quantum bits looking at staked nanowires and high mobility materials. We are engaged in the development of silicon spin qubits towards truly scalable realizations relying on industrial-level CMOS technology. Our integration work is done in collaboration with process engineers, simulation and characterization teams on one side and IC designers on the other side.<\/span><\/p>\n<p style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039);\">The integration team belongs to Leti which is an institute of CEA, a French research-and-technology organization with activities in energy, IT, healthcare, defence and security. Leti is focused on creating value and innovation through technology transfer to its industrial partners. It specializes in nanotechnologies and their applications, from wireless devices and systems, to biology, healthcare and photonics. NEMS and MEMS are at the core of its activities. In addition to Leti\u2019s 1,700 employees, there are more than 250 students involved in research activities, which makes Leti a mainspring of innovation expertise. Leti\u2019s portfolio of 2,800 patents helps strengthen the competitiveness of its industrial partners.<\/span><\/p>\n<p style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039);\">Two Leti technology platforms are bridging the gap between upstream research and development of new micro and nanotechnology applications. The\u00a0MOS 200\/300\u00a0platform provides 200mm and 300mm CMOS wafer processing, which can be applied to both semiconductor and microsystem devices.<\/span><\/p>\n<p>&nbsp;<\/p>\n<ul>\n<li class=\"MsoNormal\" style=\"background-color: #ffffff;\">\n<h3><span style=\"color: #303030;\">\u00a0Nanocharacterization Platform (NanoCarac)<\/span><\/h3>\n<\/li>\n<\/ul>\n<h3 class=\"MsoNormal\" style=\"background-color: #ffffff; text-align: justify;\"><span lang=\"EN-US\" style=\"font-size: 10.5pt; font-family: 'Open Sans', serif; background-color: white;\"><span style=\"color: rgba(0, 0, 0, 0.498039); font-family: 'Open Sans', Arial, sans-serif; font-size: 14px; text-align: justify; background-color: #ffffff;\">The Nano-Characterization Platform, now known as PFN covers a large domain of competencies, including electron microscopy, X-ray diffraction, surface analysis and sample preparation. The PFNC comprises more than 40 state-of-the-art characterization tools located in a dedicated laboratory of more 2,500m2, staffed by approximately 80 researchers and student. \u00a0<span style=\"color: #99cc00;\"><a href=\"http:\/\/www.leti.fr\/en\" style=\"color: #99cc00;\">Read more&#8230;.<\/a><\/span><\/span><\/span><\/h3>\n<p>[\/et_pb_text][\/et_pb_column][et_pb_column type=&#8221;1_3&#8243; admin_label=&#8221;Right-Picture-Zone&#8221; _builder_version=&#8221;4.21.0&#8243; custom_padding=&#8221;|||&#8221; global_colors_info=&#8221;{}&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_image src=&#8221;http:\/\/quantumsilicon-grenoble.eu\/wp-content\/uploads\/2023\/05\/QSG-Map.jpg&#8221; title_text=&#8221;QSG-Map&#8221; show_in_lightbox=&#8221;on&#8221; use_overlay=&#8221;on&#8221; align=&#8221;center&#8221; align_tablet=&#8221;center&#8221; align_phone=&#8221;&#8221; align_last_edited=&#8221;on|desktop&#8221; admin_label=&#8221;Image&#8221; _builder_version=&#8221;4.21.0&#8243; animation_style=&#8221;slide&#8221; animation_direction=&#8221;left&#8221; animation_duration=&#8221;500ms&#8221; animation_intensity_slide=&#8221;10%&#8221; sticky=&#8221;off&#8221; use_border_color=&#8221;off&#8221; border_color=&#8221;#ffffff&#8221; border_width=&#8221;1px&#8221; border_style=&#8221;solid&#8221; always_center_on_mobile=&#8221;on&#8221; global_colors_info=&#8221;{}&#8221;] [\/et_pb_image][et_pb_image src=&#8221;http:\/\/quantumsilicon-grenoble.eu\/wp-content\/uploads\/2023\/05\/HIT-Fernando-Gonzalez-work.jpg&#8221; title_text=&#8221;HIT-Fernando-Gonzalez-work&#8221; show_in_lightbox=&#8221;on&#8221; use_overlay=&#8221;on&#8221; align_tablet=&#8221;center&#8221; align_phone=&#8221;&#8221; align_last_edited=&#8221;on|desktop&#8221; admin_label=&#8221;Image&#8221; _builder_version=&#8221;4.21.0&#8243; animation_style=&#8221;slide&#8221; animation_direction=&#8221;left&#8221; animation_duration=&#8221;500ms&#8221; animation_intensity_slide=&#8221;10%&#8221; sticky=&#8221;off&#8221; use_border_color=&#8221;off&#8221; border_color=&#8221;#ffffff&#8221; border_width=&#8221;1px&#8221; border_style=&#8221;solid&#8221; always_center_on_mobile=&#8221;on&#8221; global_colors_info=&#8221;{}&#8221;] [\/et_pb_image][\/et_pb_column][\/et_pb_row][\/et_pb_section][et_pb_section fb_built=&#8221;1&#8243; custom_padding_last_edited=&#8221;on|desktop&#8221; admin_label=&#8221;Section&#8221; _builder_version=&#8221;4.16&#8243; custom_padding=&#8221;0px|0px|48px|0px&#8221; custom_padding_tablet=&#8221;50px|0|50px|0&#8243; custom_padding_phone=&#8221;&#8221; transparent_background=&#8221;off&#8221; padding_mobile=&#8221;off&#8221; make_fullwidth=&#8221;off&#8221; use_custom_width=&#8221;off&#8221; width_unit=&#8221;off&#8221; custom_width_px=&#8221;1080px&#8221; custom_width_percent=&#8221;80%&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_row column_structure=&#8221;2_3,1_3&#8243; padding_mobile=&#8221;off&#8221; column_padding_mobile=&#8221;on&#8221; admin_label=&#8221;Row&#8221; _builder_version=&#8221;4.16&#8243; background_size=&#8221;initial&#8221; background_position=&#8221;top_left&#8221; background_repeat=&#8221;repeat&#8221; custom_padding=&#8221;38px|0px|60px|0px&#8221; make_fullwidth=&#8221;off&#8221; use_custom_width=&#8221;off&#8221; width_unit=&#8221;off&#8221; custom_width_px=&#8221;1080px&#8221; custom_width_percent=&#8221;80%&#8221; global_colors_info=&#8221;{}&#8221;][et_pb_column type=&#8221;2_3&#8243; _builder_version=&#8221;4.16&#8243; custom_padding=&#8221;|||&#8221; global_colors_info=&#8221;{}&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_text admin_label=&#8221;Text&#8221; _builder_version=&#8221;4.21.0&#8243; use_border_color=&#8221;off&#8221; border_style=&#8221;solid&#8221; global_colors_info=&#8221;{}&#8221;]<\/p>\n<ul>\n<li class=\"MsoNormal\" style=\"background-color: #ffffff;\">\n<h3><span style=\"color: #303030;\">Upstream Technological Platform<span style=\"color: #e02b20;\"><b style=\"font-size: 22px;\">\u00a0<span style=\"color: #99cc00;\"><a href=\"http:\/\/pta-grenoble.com\/fr\/\" target=\"_blank\" rel=\"noopener\" title=\"Upstream Technological Platform - PTA\" style=\"color: #99cc00;\">(PTA)<\/a><\/span><\/b><\/span><\/span><\/h3>\n<\/li>\n<\/ul>\n<p class=\"MsoNormal\" style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039); font-size: 14px; text-align: justify; background-color: #ffffff;\">Compatible from small samples up to 100 mm wafers, the PTA has a wide range of equipment available for performing all the necessary steps in functionalization of micronic and submicronic objects.<br \/>The equipment is classified by technological family<\/span><\/p>\n<p class=\"MsoNormal\" style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039); font-size: 14px; text-align: justify; background-color: #ffffff;\"><strong style=\"color: rgba(0, 0, 0, 0.498039);\"><span style=\"text-decoration: underline;\">Lithography field<\/span> (UV, DUV, E-beam)<\/strong><span style=\"font-family: Arial, sans-serif;\">\u00a0<\/span><\/span><strong style=\"color: rgba(0, 0, 0, 0.498039); font-size: 14px;\">:<\/strong><span style=\"background-color: #ffffff; color: rgba(0, 0, 0, 0.498039); font-size: 14px;\"> the set of technological steps for producing photoresist patterns on the sample. The patterns will subsequently delineate the different areas of the devices to be processed. The PTA has at its disposal equipment for induction and annealing of photoresist on samples ranging from a few mm\u00b2 to 100 mm wafers. Lithography can be optic (UV, DUV) , electronic with final resolutions of 7 nm or done by nanoimprint.<\/span><\/p>\n<p class=\"MsoNormal\" style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039); font-size: 14px; text-align: justify; background-color: #ffffff;\"><br \/><strong><span style=\"text-decoration: underline;\">Etching field<\/span>\u00a0(DRIE; ICP,IBE)either: <\/strong>chemical or dry, etching enables the substrate \/ materials to be patterned through lithography or hard mask. The available etching chemistries are proper to the materials to be etched and the etching can be isotropic or anisotropic.<strong>\u00a0<\/strong><\/span><\/p>\n<p><span style=\"color: rgba(0, 0, 0, 0.498039); font-size: 14px; text-align: justify; background-color: #ffffff;\"><strong><span style=\"text-decoration: underline;\">Deposition field<\/span> (Metal and insulator sputtering, metal evaporation, ALD, PECVD, LPCVD)<\/strong><\/span><strong style=\"color: rgba(0, 0, 0, 0.498039); font-size: 14px; text-align: justify;\">:<\/strong><span style=\"background-color: #ffffff; color: rgba(0, 0, 0, 0.498039); font-size: 14px; text-align: justify;\">\u00a0The PTA is equipped with a set of depostion tools for metal, oxides, (SiN, SiO2, HfO2, Al2O3&#8230;) and semiconductors (Si, Ge,..).<\/span><\/p>\n<p class=\"MsoNormal\" style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039); font-size: 14px; text-align: justify; background-color: #ffffff;\">Metrological field: The PTA provides metrology and monitoring equipment such as optic and electronic microscope, mechanical profilometer, spectroscopic ellipsometer which are indispensable complements in process control.<\/span><\/p>\n<p class=\"MsoNormal\" style=\"text-align: justify;\"><span style=\"color: rgba(0, 0, 0, 0.498039); font-size: 14px; text-align: justify; background-color: #ffffff;\"><strong><span style=\"text-decoration: underline;\"> Micro &amp; nano systems field<\/span> :<\/strong> the PTA is equipped <span style=\"color: rgba(0, 0, 0, 0.498039);\">with<\/span> a microsystems line dedicated to fabrication of MEMS and NEMS. This includes: front\/back end alignment exposure, chemical mechanical polishing, supercritical drying, vapor HFetcher, and molecular bonding.\u00a0<\/span><\/p>\n<p>[\/et_pb_text][\/et_pb_column][et_pb_column type=&#8221;1_3&#8243; _builder_version=&#8221;4.16&#8243; custom_padding=&#8221;|||&#8221; global_colors_info=&#8221;{}&#8221; custom_padding__hover=&#8221;|||&#8221;][et_pb_image src=&#8221;http:\/\/quantumsilicon-grenoble.eu\/wp-content\/uploads\/2023\/05\/Litho-Jeol-photo-01-1.jpg&#8221; align_tablet=&#8221;center&#8221; align_phone=&#8221;&#8221; align_last_edited=&#8221;on|desktop&#8221; _builder_version=&#8221;4.16&#8243; animation_style=&#8221;slide&#8221; animation_direction=&#8221;left&#8221; animation_duration=&#8221;500ms&#8221; animation_intensity_slide=&#8221;10%&#8221; animation=&#8221;left&#8221; sticky=&#8221;off&#8221; always_center_on_mobile=&#8221;on&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_image][et_pb_slider show_pagination=&#8221;off&#8221; _builder_version=&#8221;4.21.0&#8243; 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button_text=&#8221;Read More&#8221; button_link=&#8221;http:\/\/pta-grenoble.com\/fr\/nos-equipements\/depot&#8221; url_new_window=&#8221;on&#8221; _builder_version=&#8221;4.21.0&#8243; _module_preset=&#8221;default&#8221; background_color=&#8221;RGBA(255,255,255,0)&#8221; background_enable_color=&#8221;on&#8221; background_image=&#8221;http:\/\/quantumsilicon-grenoble.eu\/wp-content\/uploads\/2023\/05\/machine-225&#215;300-1.jpg&#8221; background_enable_image=&#8221;on&#8221; background_size=&#8221;contain&#8221; background_blend=&#8221;overlay&#8221; link_option_url_new_window=&#8221;on&#8221; hover_enabled=&#8221;0&#8243; global_colors_info=&#8221;{}&#8221; sticky_transition=&#8221;on&#8221; sticky_enabled=&#8221;0&#8243;][\/et_pb_slide][et_pb_slide heading=&#8221;Lithography equipements&#8221; button_text=&#8221;Read More&#8221; button_link=&#8221;http:\/\/pta-grenoble.com\/fr\/nos-equipements\/lithographie&#8221; url_new_window=&#8221;on&#8221; _builder_version=&#8221;4.21.0&#8243; _module_preset=&#8221;default&#8221; background_color=&#8221;RGBA(255,255,255,0)&#8221; background_enable_color=&#8221;on&#8221; background_image=&#8221;http:\/\/quantumsilicon-grenoble.eu\/wp-content\/uploads\/2023\/05\/lithography-300&#215;227.jpg&#8221; background_enable_image=&#8221;on&#8221; background_size=&#8221;contain&#8221; background_blend=&#8221;darken&#8221; hover_enabled=&#8221;0&#8243; global_colors_info=&#8221;{}&#8221; sticky_transition=&#8221;on&#8221; sticky_enabled=&#8221;0&#8243;][\/et_pb_slide][et_pb_slide heading=&#8221;Etching &#8221; button_text=&#8221;Read More&#8221; button_link=&#8221;http:\/\/pta-grenoble.com\/fr\/nos-equipements\/depot&#8221; url_new_window=&#8221;on&#8221; _builder_version=&#8221;4.21.0&#8243; _module_preset=&#8221;default&#8221; background_color=&#8221;RGBA(255,255,255,0)&#8221; background_enable_color=&#8221;on&#8221; background_image=&#8221;http:\/\/quantumsilicon-grenoble.eu\/wp-content\/uploads\/2023\/05\/Etching.jpg&#8221; background_enable_image=&#8221;on&#8221; 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align_tablet=&#8221;center&#8221; align_phone=&#8221;&#8221; align_last_edited=&#8221;on|desktop&#8221; _builder_version=&#8221;4.16&#8243; animation_style=&#8221;slide&#8221; animation_direction=&#8221;left&#8221; animation_duration=&#8221;500ms&#8221; animation_intensity_slide=&#8221;10%&#8221; animation=&#8221;left&#8221; sticky=&#8221;off&#8221; always_center_on_mobile=&#8221;on&#8221; global_colors_info=&#8221;{}&#8221;][\/et_pb_image][\/et_pb_column][\/et_pb_row][\/et_pb_section]<\/p>\n","protected":false},"excerpt":{"rendered":"<p>ABOUT US &nbsp; Our group gathers\u00a0researchers from three different institutes having different complementary competences: \u00a0Experimental physicists from the Institute for Nanoscience and\u00a0Cryogenics (CEA-INAC) and from the N\u00e9el Institute (CNRS-NEEL) with an expertise\u00a0in quantum electronics, low-temperature transport, quantum coherent manipulation\u00a0of single electrons in semiconductor nanostructures Theoretical condensed-matter physicists from CEA-INAC, with a\u00a0long-standing expertise in the modeling [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"_et_pb_use_builder":"on","_et_pb_old_content":"","_et_gb_content_width":"","footnotes":""},"class_list":["post-30","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/wp-json\/wp\/v2\/pages\/30","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/wp-json\/wp\/v2\/comments?post=30"}],"version-history":[{"count":39,"href":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/wp-json\/wp\/v2\/pages\/30\/revisions"}],"predecessor-version":[{"id":4817,"href":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/wp-json\/wp\/v2\/pages\/30\/revisions\/4817"}],"wp:attachment":[{"href":"https:\/\/quantumsilicon-grenoble.eu\/index.php\/wp-json\/wp\/v2\/media?parent=30"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}